Excimer Pinnig Unit

The “all-in-one” design with an internal power supply achieved a compact, lightweight body that can easily be set up in production sites by eliminating installation hassles with no need to choose installation space. High versatility for in-line usage makes it simple to incorporate the EX-86U into already existing lines and relocate production lines, etc.

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The “all-in-one” design with an internal power supply achieved a compact, lightweight body that can easily be set up in production sites by eliminating installation hassles with no need to choose installation space. High versatility for in-line usage makes it simple to incorporate the EX-86U into already existing lines and relocate production lines, etc.

Modification

Surface modification technology is utilized in a wide range of industrial fields. Compared to ordinary techniques, material modification using excimer lamps is considered precision modifica- tion because it occurs via a chemical reaction on the atomic or molecular level. Moreover, this is clean modification that does not harm the material and generates no dust particles, and so is effective in fields requiring more advanced levels of material modification.

Principle 



Cleaning

Vacuum UV light at a wavelength of 172 nm emitted from an excimer lamp is greatly absorbed by oxygen so that highly concentrated active oxygen can be generated. Vacuum UV light is also capable of breaking the molecular bonds of organic matter and so provides benefits in various processes such as accelerating the cleaning speed, improving the cleaning quality, and increasing the product yield.

Bonding

Microfluidic devices are now actively used in various fields including medical and biological applications. The bonding technology used for such devices having fine structures requires bonding techniques with a still higher degree of quality and accuracy.

Bonding that uses excimer lamps needs no adhesive agent and causes no damage and thermal deformation, making it ideal for bonding of microfluidic devices.

Features

No damage to object

In the corona discharge and plasma methods, the target object is directly exposed to discharge and so may be damaged. In the excimer lamp method, however, the object is merely irradiated with vacuum UV light and so there will be no damage to it.

No dust particle generation

In the corona discharge and plasma methods, dust particles generated by electrode spattering might fly upward by air flow and adhere to the target object surface. The excimer lamp method solves these problems and ensures clean processing.

No processing irregularities

Unlike the corona discharge and plasma methods utilizing discharge, the excimer lamp method using light does not cause uneven irradiation and so achieves highly efficient, uniform processing over a large area.

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